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Filters &Diffusersrequired in the industry
Index06Hastelloy Gas Filter14
Performance Data[ HSF 50 ][ HSF 300 ][ HSF 1300 ]Retention≥ LRV 9 of Particle down to 0.0025 ?Materials316L Stainless Steel21 MPa (210 kfg/cm215 MPa (153 kfg/cm2) at 20 °C Max. operating temperatureConditions1 × 10 atm·cc/secFilters & DiffusersStainless Steel Gas Filter010020030020406080100Differentiapressure(kPa)FlowRate(SLPM)at20℃Inlet4barInlet6b020406080100020406080100Differentialpressure(kPFwaLa2Ine4InaIna0240401frntialpressure(kPwt(PInlaInlbIntb026002080ifeeuPaFlwaL)t0Inlet2barInlet4barInlet6bar020400000DfeapsrPFwa(P℃IntIne4rIne6ar
DimensionModelOrdering No.FLT-HSF50-04MVFLT-HSF150-04MVFLT-HSF300-04MVFLT-HSF600-08MVFLT-HSF1300-16MRA(mm)84127127B(mm)1616C(mm)38.138.138.1272727Rated Flow (SLPM)Connection SizeConnection Type50Gas FilterProductFLTFilter1/4”MVMale1/2”MR3/4”161”Filters & Diffusers07Your One-stop Total Solution Provider for UHP Gas Delivery SystemOrdering InformationFLTHSF5004MV
Performance DataSpecificationHastelloy Gas FilterRetention≥ LRV 9 of Particle down to 0.0025 ?50 SLPM / 150 SLPM / 300 SLPMMaterials316L Stainless Steel, Hastelloy C-22Max. inlet pressureHastelloy C-222) at 20 °C15 MPa (153 kfg/cm2Max. operating temperatureElement OperatingConditionsHelium Leak RatingSurface Finish Interior[ HHF 50 ][ HHF 150 ][ HHF 300 ]0100200400000fenpress(kPaFwL)t℃Int4bInbar05000006080100DiffnapsPFwt(PInbInaInlea0515003000201fralpressure(kPa)ow℃IntbIntbInltb
DimensionModelOrdering No.A(mm)B(mm)C(mm)D(mm)Filters & DiffusersYour One-stop Total Solution Provider for UHP Gas Delivery SystemOrdering InformationFLTHHF5004MVFLT-HHF50-04MVFLT-HHF150-04MVFLT-HHF150-08MV15.51616161619.0538.1Rated Flow (SLPM)Connection SizeConnection Type50Gas Filter1/4”MV150LOK04060812
Filters & DiffusersPerformance DataSpecificationGasket FilterRetention99.99 % of Particle down to 0.3 ?Rated Flow20 SLPM316L Stainless SteelElement Length (Nominal)Max. Differential Pressure1\"01020304020304050DffretiapesuPa)FlowRate(SLPM)a0℃InInlet(4bar)Inl)
Filters & Diffusers11DimensionFLTGF2004RFLT-GF20-04Ordering No.Face SealSizeFLT-GF20-043.2Rated Flow (SLPM)Connection SizeConnection TypeAEAEBDDCC
00.10.3040.50.0500,00502,00GasessureMPF(Limin)AF-L-2L25AF-LT-NW012Filters & DiffusersSpecificationBulk Gas FilterRetention≥ 0.0025 ?20,000 SLPM00..20.301,0,0,5,000euMAF-T8W5Performance Data
Filters & Diffusers13Your One-stop Total Solution Provider for UHP Gas Delivery SystemDimensionOrdering InformationModelOrdering No.FLT-180L-08LOKFLT-180L-12LOKFLT-180L-NW25FLT-180L-NW40FLT-180L-NW50FLT-270L-NW25FLT-300L-NW50A (Length)SizeB(mm)10.415.726.241.252.226.252.21801801801801802701/2\"NW50NW50TYPELOKLOKD (O.D)(mm)60.560.560.560.57589.189.1FLT180L04LOKLengthConnection SizeConnection Type180L270L063/8”NW25NW40NW50300L081/2”123/4”ADCB
14Performance DataSpecificationDiffusersRetentionGreater than 99.99 % removal of all particles down to 0.0025 ?Materials460 °C without O-ring100 °C with O-ring3SEMI F70-0302 test methodParticle Shedding[ AF-DFS08MV-001 ][ AF-DFS437 ]00.1.20.30.50.60.705,00,000srse(FlowRat(SLPM)℃00.10.2.40010.40.Gpsr(t(P)t000..6701001,0sr(al(P200....0.01.2.03aer(Mw(SL20℃
Filters & Diffusers15Ordering InformationDFS08MV25MV001(Main) Gas FittingConnection SizeProductConnection TypeConnection SizeConnection Type(2DFSDiffuser* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.06081204063/4\"Butt weldFlange2540501/4\"3/8\"1/2\"3/4\"MVLOKNW25NW4040MVLOKDFS - 04MV - ○○○[ DFS-04-Series ]Ordering No.RemarksMembrane SizeA (Φ)B (mm)D (mm)DFS-04MV-002205323.579.5DFS-04MV-003102.2ISO ClampDFS-04MV16NW-002158530132.2ISO Clamp83.5* ASFLOW Diffusers can be tailored to customers' needs with a variety of end connections. Please contact us.(Main) Gas Fitting(2DimensionACBDD
DFS - 08MV – ○○○Ordering No.RemarksMembrane SizeDFS - 08MV○○NW - ○○○DFS-08MV-001301203080120304080158523.8DFS-08MV25NW-001126DFS-08MV40NW-00130DFS-08MV40NW-0021678055* ASFLOW Diffusers can be tailored to customers' needs with a variety of end connections. Please contact us.Dimension[ DFS-08-Series ]DFS - 12MV - ○○○RemarksB (mm)C (Φ)D (mm)12033.3166DFS-12MV-0022033.3166* ASFLOW Diffusers can be tailored to customers' needs with a variety of end connections. Please contact us.[ DFS-12-Series ]16Valve & Regulator - Diaphragm ValveCCAABD
DFS – 25NW40NW - ○○○Ordering No.RemarksMembrane SizeA (Φ)30120553012055255* ASFLOW Diffusers can be tailored to customers' needs with a variety of end connections. Please contact us.[ DFS-25-Series ]DFSM-SeriesDFS-SeriesOrdering No.Membrane SizeA (Φ)B (mm)Total SizeC (Φ)D (mm)DFSMSeriesDFSM-28-00130120461701 pic, without O-ring3 pic2 pic, with hole cover3 pic, with hole coverDFSSeries3012046161.83012046161.830120464303012053.1168.830120533073012053437* ASFLOW Diffusers can be tailored to customers' needs with a variety of end connections. Please contact us.[ DFSM-Series / DFS-Series ]Valve & Regulator - Diaphragm Valve17ABD
Fundamentals of Gas FiltrationOur mission is to optimize our manufacturing processes and offer the highest qualit products at very competitive prices. Our dedicated staffs, with the assistance of EP technology leadership, are committed to making ourcompany the most efficient producer of super clean product.What’s Filtration?Filtration is a mechanical / physical operation which is used for the separation of particles from fluid. It will depend on the purification of fluids : for instance separating dust from the atmosphere to clean air.Diffusion : particle deposition via diffusion results when particles collide Interception : A particle is deposited via the interception mechanism if a structure as it follows the flow streamlines around the filter structure.higher gas velocities.Particles deposit viaelectrostatic deposition if particle to the filter surface.(a) Direct Interception(b) Inertial ImpactionParticles held by
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